Vacuum System
3-stage Vacuum Set for SPD

        It is a 3-stage vacuum system to be designed for SPD system to work under very deep vacuum level. There are two vacuum pumps from ULVAC (one Roots Pump+one Dry Pump) and one Diffusion Pump from LEYBOLD. The final vacuum level of the said vacuum system is expected to reach 0.1 Pa at EMPTY LOAD. It is particularly applied to some material evaporation under very high vacuum level. For more details, please contact us.